An Electromagnetic Field Concentrator for Process Chambers
This paper describes selected results of the design and optimization of an electromagnetic field concentrator (MFC) for process chambers. On the basis of 2D/3D FE analysis, it was confirmed that the presented new structure for an electromagnetic field concentrator with three-phase windings and an ad...
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| Autors principals: | , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI AG
2024-11-01
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| Col·lecció: | Energies |
| Matèries: | |
| Accés en línia: | https://www.mdpi.com/1996-1073/17/22/5603 |
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