An Electromagnetic Field Concentrator for Process Chambers
This paper describes selected results of the design and optimization of an electromagnetic field concentrator (MFC) for process chambers. On the basis of 2D/3D FE analysis, it was confirmed that the presented new structure for an electromagnetic field concentrator with three-phase windings and an ad...
Wedi'i Gadw mewn:
| Prif Awduron: | , |
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| Fformat: | Artigo |
| Iaith: | Inglês |
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MDPI AG
2024-11-01
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| Cyfres: | Energies |
| Pynciau: | |
| Mynediad Ar-lein: | https://www.mdpi.com/1996-1073/17/22/5603 |
| Tagiau: |
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