Fabrication and DC-Bias Manipulation Frequency Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer

Due to their excellent capabilities to generate and sense ultrasound signals in an efficient and well-controlled way at the microscale, piezoelectric micromechanical ultrasonic transducers (PMUTs) are being widely used in specific systems, such as medical imaging, biometric identification, and acous...

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Autori principali:	Tao Li, Le Zhang, Wenping Geng, Jian He, Yongkang Rao, Jiabing Huo, Kunxian Yan, Xiujian Chou
Natura:	Artigo
Lingua:	Inglês
Pubblicazione:	MDPI AG 2023-01-01
Serie:	Micromachines
Soggetti:	piezoelectric micromachined ultrasonic transducer (PMUT) aluminum nitride (AlN) microelectromechanical system (MEMS) fabrication DC bias frequency characteristics
Accesso online:	https://www.mdpi.com/2072-666X/14/1/210
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