Development of a High-Density Piezoelectric Micromachined Ultrasonic Transducer Array Based on Patterned Aluminum Nitride Thin Film

This study presents the fabrication and characterization of a piezoelectric micromachined ultrasonic transducer (pMUT; radius: 40 µm) using a patterned aluminum nitride (AlN) thin film as the active piezoelectric material. A 20 × 20 array of pMUTs using a 1 µm thick AlN thin film was designed and fa...

Ausführliche Beschreibung

Bibliografische Detailangaben

Hauptverfasser:	Eunjung Shin, Hong Goo Yeo, Ara Yeon, Changzhu Jin, Wonki Park, Sung-Chul Lee, Hongsoo Choi
Format:	Artigo
Sprache:	Inglês
Veröffentlicht:	MDPI AG 2020-06-01
Schriftenreihe:	Micromachines
Schlagworte:	aluminum nitride piezoelectric micromachined ultrasonic transducer (pMUT) two- dimensional (2D) array
Online-Zugang:	https://www.mdpi.com/2072-666X/11/6/623
Tags:	Tag hinzufügen Keine Tags, Fügen Sie das erste Tag hinzu!