Development of a High-Density Piezoelectric Micromachined Ultrasonic Transducer Array Based on Patterned Aluminum Nitride Thin Film

This study presents the fabrication and characterization of a piezoelectric micromachined ultrasonic transducer (pMUT; radius: 40 µm) using a patterned aluminum nitride (AlN) thin film as the active piezoelectric material. A 20 × 20 array of pMUTs using a 1 µm thick AlN thin film was designed and fa...

Täydet tiedot

Bibliografiset tiedot

Päätekijät:	Eunjung Shin, Hong Goo Yeo, Ara Yeon, Changzhu Jin, Wonki Park, Sung-Chul Lee, Hongsoo Choi
Aineistotyyppi:	Artigo
Kieli:	Inglês
Julkaistu:	MDPI AG 2020-06-01
Sarja:	Micromachines
Aiheet:	aluminum nitride piezoelectric micromachined ultrasonic transducer (pMUT) two- dimensional (2D) array
Linkit:	https://www.mdpi.com/2072-666X/11/6/623
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