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Design and development of a novel monolithic compliant XY stage with centimeter travel range and high payload capacity

This article proposes a novel monolithic compliant spatial parallel XY stage (SPXYS). An important feature of the SPXYS lies in that it can deliver centimeter travel range and sustain large out-of-plane payload while possessing a compact structure, which makes the SPXYS suitable for some special...

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Principais autores: S. Fan, H. Liu, D. Fan
Format: Artigo
Jezik:Inglês
Izdano: Copernicus Publications 2018-03-01
Serija:Mechanical Sciences
Online dostop:https://www.mech-sci.net/9/161/2018/ms-9-161-2018.pdf
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