The Design of a Closed-Loop Piezoelectric Friction–Inertia XY Positioning Platform with a Centimeter Travel Range

Friction–inertia piezoelectric actuators can perform long-range positioning with nanometer resolution. However, friction and inertia are not easy to control and can influence the actuator’s performance. The present study proposes a friction–inertia-type piezoelectric XY positioning platform with a s...

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主要な著者:	Zheng-Rong Guo, Hong-Sheng Tan, Chin-Shun Chang, Ing-Shouh Hwang, En-Te Hwu, Hsien-Shun Liao
フォーマット:	Artigo
言語:	Inglês
出版事項:	MDPI AG 2025-05-01
シリーズ:	Actuators
主題:	nanopositioning friction–inertia piezoelectric actuator closed-loop control
オンライン･アクセス:	https://www.mdpi.com/2076-0825/14/6/265
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