Analysis of Parametric and Subharmonic Excitation in Push-Pull Driven Disk Resonator Gyroscopes

For micro-electromechanical system (MEMS) resonators, once the devices are fabricated and packaged, their intrinsic quality factors (<i>Q</i>) will be fixed and cannot be changed, which seriously limits the further improvement of the resonator’s performance. In this paper, parametric excitation is a...

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מידע ביבליוגרפי

Principais autores:	Kai Wu, Kuo Lu, Qingsong Li, Yongmeng Zhang, Ming Zhuo, Sheng Yu, Xuezhong Wu, Dingbang Xiao
פורמט:	Artigo
שפה:	Inglês
יצא לאור:	MDPI AG 2021-01-01
סדרה:	Micromachines
נושאים:	parametric excitation/amplification quality factor parametric resonance subharmonic excitation push-pull driving method MEMS disk resonator gyroscope
גישה מקוונת:	https://www.mdpi.com/2072-666X/12/1/61
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