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Extreme sputtering: Epitaxy of multifunctional oxides heterostructures

This review provides an in-depth exploration of low-damage sputtering techniques and their importance in synthesizing high-quality epitaxial multifunctional oxide heterostructures. This review examines the factors contributing to damages during sputtering and introduces strategies for minimizing the...

Deskribapen osoa

Gorde:
Egile Nagusiak: Soo Young Jung, Dong-Hun Han, Ruiguang Ning, Min-Seok Kim, Hyung-Jin Choi, Ho Won Jang, Seung-Hyub Baek
Formatua: Artigo
Hizkuntza:Inglês
Argitaratua: Tsinghua University Press 2024-12-01
Saila:Journal of Advanced Ceramics
Gaiak:
sputtering
low damage
ion bombardment
epitaxial thin films
functional oxides
Sarrera elektronikoa:https://www.sciopen.com/article/10.26599/JAC.2024.9220988
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