Extreme sputtering: Epitaxy of multifunctional oxides heterostructures
This review provides an in-depth exploration of low-damage sputtering techniques and their importance in synthesizing high-quality epitaxial multifunctional oxide heterostructures. This review examines the factors contributing to damages during sputtering and introduces strategies for minimizing the...
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| Hauptverfasser: | , , , , , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Tsinghua University Press
2024-12-01
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| Schriftenreihe: | Journal of Advanced Ceramics |
| Schlagworte: | |
| Online-Zugang: | https://www.sciopen.com/article/10.26599/JAC.2024.9220988 |
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