Nonlinear Identification and Decoupling Sliding Mode Control of Macro-Micro Dual-Drive Motion Platform with Mechanical Backlash
A macro–micro dual-drive motion platform is a class of key system utilized in ultra-precision instruments and equipment for realizing ultra-high-precision positioning, which relates to the fields of semiconductor manufacturing, ultra-precision testing and machining, etc. Aiming at the ultra-high-pre...
Αποθηκεύτηκε σε:
| Κύριοι συγγραφείς: | , , , , |
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| Μορφή: | Artigo |
| Γλώσσα: | Inglês |
| Έκδοση: |
MDPI AG
2023-11-01
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| Σειρά: | Machines |
| Θέματα: | |
| Διαθέσιμο Online: | https://www.mdpi.com/2075-1702/11/12/1044 |
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