Fabrication of a CMOS-based Imaging Chip with Monolithically Integrated RGB and NIR Filters

Recent developments in multispectral cameras have demonstrated how compact and low-cost spectral sensors can be made by monolithically integrating filters on top of commercially available image sensors. In this paper, the fabrication of a RGB + NIR variation to such a single-chip imaging system is d...

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Detalles Bibliográficos

Principais autores:	Bart Vereecke, Els Van Besien, Deniz Sabuncuoglu Tezcan, Nick Spooren, Nicolaas Tack, Andy Lambrechts
Formato:	Artigo
Idioma:	Inglês
Publicado:	MDPI AG 2019-01-01
Series:	Proceedings
Assuntos:	CMOS image sensor monolithic integration optical filters multispectral imaging RGB NIR
Acceso en liña:	http://www.mdpi.com/2504-3900/2/13/751
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