Fabrication of a CMOS-based Imaging Chip with Monolithically Integrated RGB and NIR Filters

Recent developments in multispectral cameras have demonstrated how compact and low-cost spectral sensors can be made by monolithically integrating filters on top of commercially available image sensors. In this paper, the fabrication of a RGB + NIR variation to such a single-chip imaging system is d...

Полное описание

Библиографические подробности

Главные авторы:	Bart Vereecke, Els Van Besien, Deniz Sabuncuoglu Tezcan, Nick Spooren, Nicolaas Tack, Andy Lambrechts
Формат:	Artigo
Язык:	Inglês
Опубликовано:	MDPI AG 2019-01-01
Серии:	Proceedings
Предметы:	CMOS image sensor monolithic integration optical filters multispectral imaging RGB NIR
Online-ссылка:	http://www.mdpi.com/2504-3900/2/13/751
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