A Straightforward Approach for Synthesizing Electromechanical Sigma-Delta MEMS Accelerometers
The EM-<inline-formula> <math display="inline"> <semantics> <mrow> <mo>Σ</mo> <mo>Δ</mo> </mrow> </semantics> </math> </inline-formula> (electromechanical sigma-delta) approach is a concise and efficient way to realize the digital interface for micro-electromechanical systems (MEMS) accele...
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| Principais autores: | , , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI AG
2019-12-01
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| Series: | Sensors |
| Assuntos: | |
| Acceso en liña: | https://www.mdpi.com/1424-8220/20/1/91 |
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