Grating Interferometer with Redundant Design for Performing Wide-Range Displacement Measurements
Grating interferometers that use large two-dimensional grating splice modules for performing wide-range measurements have significant advantages for identifying the position of the wafer stage. However, the manufacturing process of large two-dimensional grating splice modules is very difficult. In c...
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| Huvudupphov: | , , , , , , |
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| Materialtyp: | Artigo |
| Språk: | Inglês |
| Utgiven: |
MDPI AG
2022-05-01
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| Serie: | Sensors |
| Ämnen: | |
| Länkar: | https://www.mdpi.com/1424-8220/22/10/3738 |
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