Unraveling Mass Transfer and Reaction Processes in CVD-Grown MoS₂ Films: A Multiphysical Field Coupling Study

The two-dimensional semiconductor material MoS₂, grown via chemical vapor deposition, has shown significant potential to surpass silicon in advanced electronic technologies. However, the mass transfer and chemical reaction processes critical to the nucleation and growth of MoS₂...

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Detalhes bibliográficos

Principais autores:	Zhen Yang, Jinwei Lin, Qing Zhang, Yutian Liu, Shujun Han, Yanbin Zhou, Shuo Chen, Shenlong Zhong, Xianli Su, Qingjie Zhang, Xinfeng Tang
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2025-02-01
coleção:	Applied Sciences
Assuntos:	MoS<sub>2</sub> CVD finite-element modeling mass transfer
Acesso em linha:	https://www.mdpi.com/2076-3417/15/5/2627
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