Through Silicon MEMS Inspection with a Near-Infrared Laser Scanning Setup

The inspection of encapsulated MEMS devices typically relies on destructive methods which compromise the structural integrity of samples. In this work, we present the concept and preliminary experimental validation of a laser scanning setup to non-destructively inspect silicon-encapsulated microstru...

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Номзүйн дэлгэрэнгүй

Үндсэн зохиолчид:	Manuel J. L. F. Rodrigues, Inês S. Garcia, Joana D. Santos, Filipa C. Mota, Filipe S. Alves, Diogo E. Aguiam
Формат:	Artigo
Хэл сонгох:	Inglês
Хэвлэсэн:	MDPI AG 2025-07-01
Цуврал:	Sensors
Нөхцлүүд:	MEMS IR Inspection tool nanometrology
Онлайн хандалт:	https://www.mdpi.com/1424-8220/25/15/4627
Шошгууд:	Шошго нэмэх Шошго байхгүй, Энэхүү баримтыг шошголох эхний хүн болох!