Technology and principle of TOC treatment in electronic grade ultra-pure water
Electronic grade ultra-pure water(E-UPW) is one of the basic production materials for semiconductor industry. It has extremely high water quality standards that require the removal of all soluble and insoluble substances from the water as much as possible. Total organic carbon(TOC) in water is one o...
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| Principais autores: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Chinês |
| Publicado em: |
Editorial Office of Industrial Water Treatment
2026-02-01
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| coleção: | Gongye shui chuli |
| Assuntos: | |
| Acesso em linha: | https://www.iwt.cn/CN/rich_html/10.19965/j.cnki.iwt.2025-0256 |
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