Technology and principle of TOC treatment in electronic grade ultra-pure water

Electronic grade ultra-pure water(E-UPW) is one of the basic production materials for semiconductor industry. It has extremely high water quality standards that require the removal of all soluble and insoluble substances from the water as much as possible. Total organic carbon(TOC) in water is one o...

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Bibliografiska uppgifter

Huvudupphov:	LIU Che, XU Ranlong, XUE Yanei, SUN Wenjun, ZHANG Licheng, LIU Changda
Materialtyp:	Artigo
Språk:	Chinês
Utgiven:	Editorial Office of Industrial Water Treatment 2026-02-01
Serie:	Gongye shui chuli
Ämnen:	electronic grade ultra-pure water total organic carbon small molecule organic matter
Länkar:	https://www.iwt.cn/CN/rich_html/10.19965/j.cnki.iwt.2025-0256
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