Force balanced chip scale gravimeter achieving record low self noise of 0.1 μGal/√Hz

Abstract Micro-electro-mechanical systems (MEMS) gravimeters are emerging as promising next-generation tools to overcome the high costs and large dimensions of conventional gravimeters. However, persistent sensitivity limitations have hindered their practical adoption. This paper presents a pioneeri...

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Principais autores:	Le Gao, WenJie Wu, FangZheng Li, Bingyang Cai, RunHan Xie, Zhong Zhang, LuJia Yang, Jian Zhang, MaoJun Peng, Yuan Wang, Pui-In Mak, Hang Li, LiangCheng Tu
Format:	Artigo
Jezik:	Inglês
Izdano:	Nature Publishing Group 2026-01-01
Serija:	Microsystems & Nanoengineering
Online dostop:	https://doi.org/10.1038/s41378-025-01039-6
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