Terahertz Rectangular Waveguides by UV-LIGA with Megasonic Agitation
This paper researches the fabrication of a WR2.8 terahertz rectangular waveguide operating at the frequency ranging from 260 GHz to 400 GHz via UV-LIGA technology (UV-lithography, electroplating, and molding). In the process, megasonic agitation is applied to improve the mechanical properties and in...
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| Principais autores: | , , , , , |
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| 格式: | Artigo |
| 語言: | Inglês |
| 出版: |
MDPI AG
2022-09-01
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| 叢編: | Micromachines |
| 主題: | |
| 在線閱讀: | https://www.mdpi.com/2072-666X/13/10/1601 |
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