Unraveling the Origins of Fatigue in Hafnia Ferroelectric Capacitors
This study investigates the role of positively charged oxygen vacancies in the central region of ferroelectric capacitors and their impact on fatigue. It has been found that, during fatigue, positively charged oxygen vacancies accumulate in the central region, leading to significant degradation in d...
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| Asıl Yazarlar: | , , , |
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| Materyal Türü: | Artigo |
| Dil: | Inglês |
| Baskı/Yayın Bilgisi: |
IEEE
2025-01-01
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| Seri Bilgileri: | IEEE Journal of the Electron Devices Society |
| Konular: | |
| Online Erişim: | https://ieeexplore.ieee.org/document/11053969/ |
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