Unraveling the Origins of Fatigue in Hafnia Ferroelectric Capacitors

This study investigates the role of positively charged oxygen vacancies in the central region of ferroelectric capacitors and their impact on fatigue. It has been found that, during fatigue, positively charged oxygen vacancies accumulate in the central region, leading to significant degradation in d...

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Principais autores:	Hyeon-Seo Do, Ik-Jyae Kim, Jiwoung Choi, Jang-Sik Lee
格式:	Artigo
語言:	Inglês
出版:	IEEE 2025-01-01
叢編:	IEEE Journal of the Electron Devices Society
主題:	Ferroelectric materials ferroelectric memories ferroelectric capacitors reliability fatigue oxygen vacancy
在線閱讀:	https://ieeexplore.ieee.org/document/11053969/
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