Formation of luminescent defects in 4H-SiC upon ion irradiation and ns laser annealing
Abstract We present a novel approach for the optical activation of the negatively-charged silicon vacancy ( VSi −) center in ion irradiated silicon carbide (SiC) via ns-pulsed laser annealing in the 234–2180 mJ cm− 2 energy density range. The laser annealing process is investigated under 355 nm and...
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| Egile Nagusiak: | , , , , , , , , , , , , , , , |
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| Formatua: | Artigo |
| Hizkuntza: | Inglês |
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Nature Portfolio
2025-11-01
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| Saila: | Scientific Reports |
| Gaiak: | |
| Sarrera elektronikoa: | https://doi.org/10.1038/s41598-025-23259-6 |
| Etiketak: |
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