Driving and Sensing M/NEMS Flexural Vibration Using Dielectric Transduction
We show that nanometer-scale dielectric thin films can act as efficient electromechanical transducers to simultaneously drive and sense the vibration of the first flexural mode of micro/nano-cantilevers. Here, 16 μm-long, 5 μm-wide and 350 nm-thick cantilevers are actuated by a 15 nm-thick silicon n...
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| Principais autores: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI AG
2017-08-01
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| coleção: | Proceedings |
| Assuntos: | |
| Acesso em linha: | https://www.mdpi.com/2504-3900/1/4/300 |
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