Dielectric Characteristics of Barium Strontium Titanate Based Metal Insulator Metal Capacitor for Dynamic Random Access Memory Cell
In this research work, the Metal-Insulator-Metal (MIM) capacitor structure is designed and fabricated with barium strontium titanate (BST) oxide material as the capacitor dielectric material and silver as both top and bottom electrodes for dynamic random access memory (DRAM) cell. This designed capa...
Αποθηκεύτηκε σε:
| Κύριοι συγγραφείς: | , , , , |
|---|---|
| Μορφή: | Artigo |
| Γλώσσα: | Inglês |
| Έκδοση: |
Elsevier
2012-12-01
|
| Σειρά: | International Journal of Electrochemical Science |
| Θέματα: | |
| Διαθέσιμο Online: | http://www.sciencedirect.com/science/article/pii/S1452398123165126 |
| Ετικέτες: |
Δεν υπάρχουν, Καταχωρήστε ετικέτα πρώτοι!
|