Dielectric Characteristics of Barium Strontium Titanate Based Metal Insulator Metal Capacitor for Dynamic Random Access Memory Cell

In this research work, the Metal-Insulator-Metal (MIM) capacitor structure is designed and fabricated with barium strontium titanate (BST) oxide material as the capacitor dielectric material and silver as both top and bottom electrodes for dynamic random access memory (DRAM) cell. This designed capa...

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Hlavní autoři:	R. Balachandran, B.H. Ong, H.Y. Wong, K.B. Tan, M.Muhamad Rasat
Médium:	Artigo
Jazyk:	Inglês
Vydáno:	Elsevier 2012-12-01
Edice:	International Journal of Electrochemical Science
Témata:	Barium strontium titanate Capacitor Electrodes Dielectric constant Dielectric characteristics
On-line přístup:	http://www.sciencedirect.com/science/article/pii/S1452398123165126
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