Modeling the Piezoelectric Cantilever Resonator with Different Width Layers
The piezoelectric cantilever resonator is used widely in many fields because of its perfect design, easy-to-control process, easy integration with the integrated circuit. The tip displacement and resonance frequency are two important characters of the piezoelectric cantilever resonator and many mode...
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| Auteurs principaux: | , , |
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| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
MDPI AG
2020-12-01
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| Collection: | Sensors |
| Sujets: | |
| Accès en ligne: | https://www.mdpi.com/1424-8220/21/1/87 |
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