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Impact of water vapor annealing treatments on Al2O3/diamond interface

Our group developed the first inversion-type p-channel diamond metal–oxide–semiconductor field-effect transistor, which featured normally off properties by employing water vapor annealing treatments for the oxygen-terminated diamond surface. Despite the comprehensive device-grade characterization, t...

Whakaahuatanga katoa

I tiakina i:
Ngā taipitopito rārangi puna kōrero
Ngā kaituhi matua: Xufang Zhang, Tsubasa Matsumoto, Mitsuru Sometani, Masahiko Ogura, Hiromitsu Kato, Toshiharu Makino, Daisuke Takeuchi, Takao Inokuma, Satoshi Yamasaki, Norio Tokuda
Hōputu: Artigo
Reo:Inglês
I whakaputaina: AIP Publishing LLC 2024-03-01
Rangatū:AIP Advances
Urunga tuihono:http://dx.doi.org/10.1063/5.0188372
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