Performance Analysis of Scandium-Doped Aluminum Nitride-Based PMUTs Under High-Temperature Conditions
PMUTs have been widely studied in recent years, particularly those based on the SOI (silicon-on-insulator) process, which have been partially commercialized and are extensively used in advanced applications such as ultrasonic ranging and spatial positioning. However, there has been little research o...
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| Principais autores: | , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI AG
2025-02-01
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| Series: | Applied Sciences |
| Assuntos: | |
| Acceso en liña: | https://www.mdpi.com/2076-3417/15/5/2428 |
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