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Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review

This paper reviews the research and development of micromachined accelerometers with a noise floor lower than 1 µg/√Hz. Firstly, the basic working principle of micromachined accelerometers is introduced. Then, different methods of reducing the noise floor of micromachined accelerometers are analyzed...

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Hoofdauteurs: Chen Wang, Fang Chen, Yuan Wang, Sina Sadeghpour, Chenxi Wang, Mathieu Baijot, Rui Esteves, Chun Zhao, Jian Bai, Huafeng Liu, Michael Kraft
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: MDPI AG 2020-07-01
Reeks:Sensors
Onderwerpen:
micromachined/micro accelerometers
accelerometer structure
low-g accelerometer
seismometer
Micro-Electro–Mechanical System (MEMS)
inertial sensors
Online toegang:https://www.mdpi.com/1424-8220/20/14/4054
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