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Analysis of the Performance Variation Mechanism of MEMS Suspended Inductors under Mechanical Shock

Micro-electromechanical system (MEMS) suspended inductors have been widely studied in recent decades because of their excellent radio frequency performance. However, the deformation of the inductor coil and the performance variation usually occur to the MEMS suspended inductors when the inductors ar...

Whakaahuatanga katoa

I tiakina i:
Ngā taipitopito rārangi puna kōrero
Ngā kaituhi matua: Yiyuan Li, Lixin Xu, Jianhua Li
Hōputu: Artigo
Reo:Inglês
I whakaputaina: MDPI AG 2019-10-01
Rangatū:Micromachines
Ngā marau:
Urunga tuihono:https://www.mdpi.com/2072-666X/10/10/686
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