Mechanical Response of MEMS Inductor with Auxiliary Pillar under High-g Shock
Micro-electromechanical system (MEMS) suspended inductors have excellent radio-frequency (RF) performance, but poor mechanical properties. To improve their reliability, auxiliary pillars have been used. However, few studies have been carried out on the response of a suspended inductor with auxiliary...
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| Autors principals: | , , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI AG
2018-04-01
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| Col·lecció: | Micromachines |
| Matèries: | |
| Accés en línia: | http://www.mdpi.com/2072-666X/9/4/176 |
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