Electrostatic anti-spring-enhanced MEMS accelerometer with auto-tuning capability
Abstract This study introduces a MEMS accelerometer equipped with an adaptive tuning system for an electrostatic anti-spring. As the input acceleration increases, the sensitivity of the adaptive MEMS accelerometer decreases to compensate for the measurement range. It leverages the benefits of both c...
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| Principais autores: | , , , , , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group
2025-10-01
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| coleção: | Microsystems & Nanoengineering |
| Acesso em linha: | https://doi.org/10.1038/s41378-025-01006-1 |
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