Electrostatic anti-spring-enhanced MEMS accelerometer with auto-tuning capability
Abstract This study introduces a MEMS accelerometer equipped with an adaptive tuning system for an electrostatic anti-spring. As the input acceleration increases, the sensitivity of the adaptive MEMS accelerometer decreases to compensate for the measurement range. It leverages the benefits of both c...
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| Главные авторы: | , , , , , , , , , , |
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| Формат: | Artigo |
| Язык: | Inglês |
| Опубликовано: |
Nature Publishing Group
2025-10-01
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| Серии: | Microsystems & Nanoengineering |
| Online-ссылка: | https://doi.org/10.1038/s41378-025-01006-1 |
| Метки: |
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