Thermoelectric Energy Micro Harvesters with Temperature Sensors Manufactured Utilizing the CMOS-MEMS Technique

This study develops a TEMH (thermoelectric energy micro harvester) chip utilizing a commercial 0.18 μm CMOS (complementary metal oxide semiconductor) process. The chip contains a TEMH and temperature sensors. The TEMH is established using a series of 54 thermocouples. The use of the temperature sens...

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Principais autores:	Yi-Xuan Shen, Yao-Chuan Tsai, Chi-Yuan Lee, Chyan-Chyi Wu, Ching-Liang Dai
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2022-08-01
coleção:	Micromachines
Assuntos:	thermoelectric energy micro harvester complementary metal oxide semiconductor microelectromechanical system thermocouple cooling sheet
Acesso em linha:	https://www.mdpi.com/2072-666X/13/8/1258
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