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Batch-fabrication of all-dielectric vapor cells enabling optically addressed Rydberg atom electrometry

Abstract Millimeter-scale atomic vapor cells can be accurately and economically batch-fabricated by anodically bonding silicon and glass wafers, enabling the manufacturing of miniature atomic clocks and quantum sensors. However, silicon’s high dielectric constant and conductive losses at millimeter...

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Autors principals: Alexandra B. Artusio-Glimpse, Adil Meraki, Hunter Shillingburg, Guy Lavallee, Miao Liu, Chad Eichfeld, Nikunjkumar Prajapat, Matthew T. Simons, Glenn Holland, Christopher L. Holloway, Vladimir A. Aksyuk, Daniel Lopez
Format: Artigo
Idioma:Inglês
Publicat: Nature Publishing Group 2026-06-01
Col·lecció:Microsystems & Nanoengineering
Accés en línia:https://doi.org/10.1038/s41378-026-01221-4
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