Batch-fabrication of all-dielectric vapor cells enabling optically addressed Rydberg atom electrometry
Abstract Millimeter-scale atomic vapor cells can be accurately and economically batch-fabricated by anodically bonding silicon and glass wafers, enabling the manufacturing of miniature atomic clocks and quantum sensors. However, silicon’s high dielectric constant and conductive losses at millimeter...
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| Hoofdauteurs: | , , , , , , , , , , , |
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| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
Nature Publishing Group
2026-06-01
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| Reeks: | Microsystems & Nanoengineering |
| Online toegang: | https://doi.org/10.1038/s41378-026-01221-4 |
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