Exchangeable Miniaturized Mass Spectrometer Chip Based on Silicon Structures

This paper reports a design of an exchangeable miniaturized mass spectrometry chip using spring-loaded pins and O-rings for electrical and fluidic connections. This planar microelectromechanical system (MEMS)-chip works with 300 µm high silicon structures between two borosilicate glasses and has a s...

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Egile Nagusiak:	Stephan Westerdick, Patrick Hermanns, Benedikt Janßen, Thomas Musch
Formatua:	Artigo
Hizkuntza:	Inglês
Argitaratua:	MDPI AG 2018-11-01
Saila:	Proceedings
Gaiak:	micro-mass spectrometer MEMS-Chip silicon-chip spring-loaded pin o-ring LiGa-technology travelling wave
Sarrera elektronikoa:	https://www.mdpi.com/2504-3900/2/13/1071
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