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Fabrication of Silicon Nanowire Sensors for Highly Sensitive pH and DNA Hybridization Detection

A highly sensitive silicon nanowire (SiNW)-based sensor device was developed using electron beam lithography integrated with complementary metal oxide semiconductor (CMOS) technology. The top-down fabrication approach enables the rapid fabrication of device miniaturization with uniform and strictly...

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Principais autores: Siti Fatimah Abd Rahman, Nor Azah Yusof, Mohd Khairuddin Md Arshad, Uda Hashim, Mohammad Nuzaihan Md Nor, Mohd Nizar Hamidon
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI AG 2022-08-01
coleção:Nanomaterials
Assuntos:
silicon nanowire
biosensor
pH
DNA hybridization
electrical detection
Acesso em linha:https://www.mdpi.com/2079-4991/12/15/2652
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