High Performance On-Chip Energy Storage Capacitors with Plasma-Enhanced Atomic Layer-Deposited Hf_0.5Zr_0.5O₂/Al-Doped Hf_0.25Zr_0.75O₂ Nanofilms as Dielectrics

Concurrently achieving high energy storage density (ESD) and efficiency has always been a big challenge for electrostatic energy storage capacitors. In this study, we successfully fabricate high-performance energy storage capacitors by using antiferroelectric (AFE) Al-doped Hf_0.25Zr<sub>0...

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Autori principali:	Yuli He, Guang Zheng, Bao Zhu, Xiaohan Wu, Wen-Jun Liu, David Wei Zhang, Shi-Jin Ding
Natura:	Artigo
Lingua:	Inglês
Pubblicazione:	MDPI AG 2023-05-01
Serie:	Nanomaterials
Soggetti:	Al-doped Hf<sub>0.25</sub>Zr<sub>0.75</sub>O<sub>2</sub> antiferroelectric energy storage density energy storage efficiency
Accesso online:	https://www.mdpi.com/2079-4991/13/11/1765
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