A Comprehensive Review of Optical Metrology and Perception Technologies

Optical metrology and perception technologies employ light as an information carrier to enable non-contact, high-precision measurement of geometry, dynamics, and material properties. They are widely deployed in industrial and consumer domains, from nanoscale defect inspection in semiconductor manufa...

Celý popis

Podrobná bibliografie

Hlavní autoři:	Shuonan Shan, Fangyuan Zhao, Zinan Li, Linbin Luo, Xinghui Li
Médium:	Artigo
Jazyk:	Inglês
Vydáno:	MDPI AG 2025-11-01
Edice:	Sensors
Témata:	optical metrology perception technology interferometry imaging spectroscopy hybrid optical systems
On-line přístup:	https://www.mdpi.com/1424-8220/25/22/6811
Tagy:	Přidat tag Žádné tagy, Buďte první, kdo vytvoří štítek k tomuto záznamu!