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Feasibility Study on Magnetorheological Finishing of Thin Copper Substrate

Abstract Thin copper substrates with high accuracy are highly required in precision physical experiments. However, even using double-sided lapping, the flatness is still limited due to the accuracy of lapping plate, process vibration and so on. Hence, as a subsequent process, this paper employs magn...

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Bibliografiske detaljer
Principais autores: Bo Pan, Renke Kang, Yunfei Zhang, Kailong Li, Dongxing Du, Xiaoguang Guo, Chao Wang, Jiang Guo, Xianglong Zhu, Wen Huang
Format: Artigo
Sprog:Inglês
Udgivet: KeAi Communications Co., Ltd. 2024-12-01
Serier:Chinese Journal of Mechanical Engineering
Fag:
Online adgang:https://doi.org/10.1186/s10033-024-01154-x
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