Electron energy probability function and L-p similarity in low pressure inductively coupled bounded plasma

Particle-In-Cell (PIC) simulations are carried out to investigate the effect of discharge length (L) and pressure (p) on Electron Energy Probability Function (EEPF) in a low pressure radio frequency (rf) inductively coupled plasma at 13.56 MHz. It is found that for both cases of varying L (0.1 - 0.5...

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Autori principali:	Sudeep eBhattacharjee, Sanghamitro eChatterjee, Christine eCharles, Roderick William Boswell
Natura:	Artigo
Lingua:	Inglês
Pubblicazione:	Frontiers Media S.A. 2015-02-01
Serie:	Frontiers in Physics
Soggetti:	inductively coupled plasma (ICP) Particle balance Maxwellian distribution Particle-in-cell (PIC) simulations Electron energy probability function (EEPF) L-p similarity
Accesso online:	http://journal.frontiersin.org/Journal/10.3389/fphy.2015.00007/full
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