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Electron energy probability function and L-p similarity in low pressure inductively coupled bounded plasma

Particle-In-Cell (PIC) simulations are carried out to investigate the effect of discharge length (L) and pressure (p) on Electron Energy Probability Function (EEPF) in a low pressure radio frequency (rf) inductively coupled plasma at 13.56 MHz. It is found that for both cases of varying L (0.1 - 0.5...

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Principais autores: Sudeep eBhattacharjee, Sanghamitro eChatterjee, Christine eCharles, Roderick William Boswell
Formato: Artigo
Idioma:Inglês
Publicado: Frontiers Media S.A. 2015-02-01
Series:Frontiers in Physics
Assuntos:
inductively coupled plasma (ICP)
Particle balance
Maxwellian distribution
Particle-in-cell (PIC) simulations
Electron energy probability function (EEPF)
L-p similarity
Acceso en liña:http://journal.frontiersin.org/Journal/10.3389/fphy.2015.00007/full
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