Investigation of a Macromolecular Additive on the Decrease of the Aluminum Horizontal Etching Rate in the Wet Etching Process

The effect of a macromolecular additive on the etching rate of aluminum (Al) horizontal etching in the wet process was investigated in this work. The horizontal etching in the Al wet etching process became more evident as the film Al becomes thicker. The proposed macromolecule additive, including po...

Deskribapen osoa

Xehetasun bibliografikoak

Egile Nagusiak:	Jingxiu Ding, Ruipeng Zhang, Yuchun Li, David Wei Zhang, Hongliang Lu
Formatua:	Artigo
Hizkuntza:	Inglês
Argitaratua:	MDPI AG 2022-05-01
Saila:	Metals
Gaiak:	aluminum wet etching horizontal etching undercut macromolecule additive
Sarrera elektronikoa:	https://www.mdpi.com/2075-4701/12/5/813
Etiketak:	Etiketa erantsi Etiketarik gabe, Izan zaitez lehena erregistro honi etiketa jartzen!