An Experimental Study on Fabricating an Inverted Mesa-Type Quartz Crystal Resonator Using a Cheap Wet Etching Process

In this study, a miniaturized high fundamental frequency quartz crystal microbalance (QCM) is fabricated for sensor applications using a wet etching technique. The vibration area is reduced in the fabrication of the high frequency QCM with an inverted mesa structure. To reduce the complexity of the...

Бүрэн тодорхойлолт

Номзүйн дэлгэрэнгүй

Үндсэн зохиолчид:	Xuefeng Li, Toshitsugu Ueda, Jing Zhang, Tian Zhang, Jia Huang, Jinxing Liang
Формат:	Artigo
Хэл сонгох:	Inglês
Хэвлэсэн:	MDPI AG 2013-09-01
Цуврал:	Sensors
Нөхцлүүд:	quartz crystal microbalance high fundamental frequency wet etching process rectangle high Q value
Онлайн хандалт:	http://www.mdpi.com/1424-8220/13/9/12140
Шошгууд:	Шошго нэмэх Шошго байхгүй, Энэхүү баримтыг шошголох эхний хүн болох!