An Experimental Study on Fabricating an Inverted Mesa-Type Quartz Crystal Resonator Using a Cheap Wet Etching Process

In this study, a miniaturized high fundamental frequency quartz crystal microbalance (QCM) is fabricated for sensor applications using a wet etching technique. The vibration area is reduced in the fabrication of the high frequency QCM with an inverted mesa structure. To reduce the complexity of the...

Täydet tiedot

Bibliografiset tiedot

Päätekijät:	Xuefeng Li, Toshitsugu Ueda, Jing Zhang, Tian Zhang, Jia Huang, Jinxing Liang
Aineistotyyppi:	Artigo
Kieli:	Inglês
Julkaistu:	MDPI AG 2013-09-01
Sarja:	Sensors
Aiheet:	quartz crystal microbalance high fundamental frequency wet etching process rectangle high Q value
Linkit:	http://www.mdpi.com/1424-8220/13/9/12140
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