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Investigation of Angular Spectrum of Scattered Inert Gas Ions from the InGaP (001) Surface

It has been shown that this method is quite suitable for surface studies and diagnostics of many component materials. The values of the azimuthal angle of distribution of Ne, Ar and Xe ions scattered from InGaP (001) <110> are obtained. The relationship between the spatial variables of the scattered...

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Autors principals: M.K. Karimov, U.O. Kutliev, S.B. Bobojonova, K.U. Otabaeva
Format: Artigo
Idioma:Inglês
Publicat: Vasyl Stefanyk Carpathian National University 2021-11-01
Col·lecció:Фізика і хімія твердого тіла
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Accés en línia:https://journals.pnu.edu.ua/index.php/pcss/article/view/5238
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