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Population Kinetics Modeling of Low-Temperature Argon Plasma

Optical emission spectroscopy has been widely used in low-temperature argon plasma diagnostics. A coronal model is usually used to analyze the measured line ratios for diagnostics with a single temperature and density. However, many plasma processing conditions deviate from single temperature and de...

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Principais autores: Hyun-Kyung Chung, Mi-Young Song, Ji-Won Kwon, Myeong-Geon Lee, Jihoon Park, Namjae Bae, Jeamin Song, Gon-Ho Kim, Dipti, Yuri Ralchenko
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2021-11-01
Serier:Atoms
Fag:
argon optical emission spectroscopy
plasma processing
coronal models
collisional-radiative model
nonlocal thermodynamic equilibrium plasmas
population kinetics
Online adgang:https://www.mdpi.com/2218-2004/9/4/100
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